Fabio Santagata
Publications
- Characterization of an Acetone Detector based on a Suspended WO3-Gate AlGaN/GaN HEMT Integrated with Micro-heater
Jianwen Sun; Robert Sokolovskij; Elina Iervolino; Fabio Santagata; Zewen Liu; Pasqualina M. Sarro; GuoQi Zhang;
IEEE Transactions on Electron Devices,
2019. DOI: 10.1109/TED.2019.2936912
document - Hydrogen sulfide detection properties of Pt-gated AlGaN/GaN HEMT-sensor
Sokolovskij, R.; Zhang, J.; Iervolino, E.; Zhao, C.; Santagata, F.; Wang, F.; Yu, H.; Sarro, P. M.; GuoQi Zhang;
Sensors and Actuators B: Chemical,
2018. DOI: 10.1016/j.snb.2018.08.015 - Integrated virtual impactor enabled PM 2.5 sensor
Mingzhi Dong; E Iervolino; F Santagata; G Zhang; GuoQi Zhang;
IEEE Sensors Journal,
Volume 17, Issue 9, pp. 2814-2821, 2017. - Pt-AlGaN/GaN HEMT-Sensor for Hydrogen Sulfide (H2S) Detection
R Sokolovskij; E Iervolino; C Zhao; F Santagata; F Wang; H Yu; PM Sarro; GuoQi Zhang;
In Proceedings of Eurosensors,
pp. 463, 2017. - Potential applications of electron emission membranes in medicine
Yevgen Bilevych; Stefan E. Brunner; Hong Wah Chan; Edoardo Charbon; Harry van der Graaf; Cornelis W. Hagen; Gert Nützelf; Serge D. Pintof; Violeta Prodanović; Daan Rotman; Fabio Santagata; Lina Sarro; Dennis R. Schaar;
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment,
Volume 809, pp. 171-174, 2016. - Silicon microfabrication based particulate matter sensor
Mingzhi Dong; Elina Iervolino; Fabio Santagata; GuoQi Zhang;
Sensors and Actuators A: Physical,
Volume 247, pp. 115-124, 2016. - Thermal characterization of carbon nanotube foam using MEMS microhotplates and thermographic analysis
Cinzia Silvestri; Michele Riccio; Rene Poelma; Bruno Morana; Sten Vollebregt; Fabio Santagata; Andrea Irace; GuoQi Zhang; Pasqualina M. Sarro;
Nanoscale,
Volume 8, pp. 8266-8275, 2016.
document - Precision recess of AlGaN/GaN with controllable etching rate using ICP-RIE oxidation and wet etching
R. Sokolovskij; J. Sun; F. Santagata; E. Iervolino; S. Li; G.Y. Zhang; P.M.Sarro; GuoQi Zhang;
In Procedia Engineering: Proceedings of the 30th anniversary Eurosensors Conference,
pp. 1094-1097, 2016. - 3D system-in-package design using stacked silicon submount technology
Mingzhi Dong; Fabio Santagata; Robert Sokolovskij; Jia Wei; Cadmus Yuan; GuoQi Zhang;
Microelectronics International,
Volume 32, Issue 2, pp. 63-72, 2015. - Electro-thermal simulation and characterization of vertically aligned CNTs directly grown on a suspended microhoplate for thermal management applications
C. Silvestri; P. Piacciafoco; B. Morana; F. Santagata; GuoQi Zhang; P.M. Sarro;
In IEEE Sensors,
pp. 827-830, 2014.
document - Miniaturized particulate matter sensor for portable air quality monitoring devices
Xueming Li; E Iervolino; F Santagata; Jia Wei; Cadmus Yuan; PM Sarro; GuoQi Zhang;
In IEEE Sensors,
pp. 2151-2154, 2014. - CNT bundles growth on microhotplates for direct measurement of their thermal properties
C. Silvestri; B. Morana; G. Fiorentino; S. Vollebregt; G. Pandraud; F. Santagata; GuoQi Zhang; P.M. Sarro;
In 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014),
San Francisco, USA, Jan. 2014.
document - Novel system-in-package design and packaging solution for solid state lighting systems
Mingzhi Dong; Santagata, F; Jia Wei; Yuan, C; GuoQi Zhang;
In Proceedings - 64th Electronic Components and Technology Conference,
pp. 1192-1197, 2014. - Resonance frequency of locally heated cantilever beams
E. Iervolino; M. Riccio; F. Santagata; J. Wei; A.W. van Herwaarden; A. Irace; G. Breglio; P.M. Sarro;
Sensors and Actuators A,
Volume 190, pp. 6-12, Feb. 2013. DOI 10.1016/j.sna.2012.10.008. - Fully back-end TSV process by Cu electro-less plating for 3D smart sensor systems
F. Santagata; C. Farriciello; G. Fiorentino; H.W. van Zeijl; C. Silvestri; GuoQi Zhang; P.M. Sarro;
Journal of Micromechanics and Microengineering,
2013. - Thermal Analysis for Silicon-based Integration of LED Systems
Mingzhi Dong; Fabio Santagata; Jia Wei; Cadmus Yuan; GuoQi Zhang;
In 10th China International Forum on Solid State Lighting,
2013. - A CMOS-compatible metamaterial to enhance the front to back radiation ratio in terahertz antenna for sensing application
Fiorentino, G; Syed, W; Santagata, F; Spirito, M; Pandraud, G; Neto, A; Sarro, PM; Adam, AJL;
In Sensors, 2013 IEEE,
IEEE, pp. 1--4, 2013. - Carbon Nanotube based heat-sink for solid state lighting
F. Santagata; G. Almanno; S. Vollebregt; C Silvestri; GuoQi Zhang; P.M. Sarro;
In 8th IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems (NEMS),
pp. 1214-1217, Apr 2013. DOI 10.1109/NEMS.2013.6559937. - A molybdenum MEMS microhotplate for high-temperature operation
L. Mele; F. Santagata; E. Iervolino; M. Mihailovic; T. Rossi; A.T. Tran; H. Schellevis; J.F. Creemer; P.M. Sarro;
Sensors and Actuators A,
2012. DOI 10.1016/j.sna.2011.11.023. - Tube-shaped Pirani gauge for in situ hermeticity monitoring of SiN thin-film encapsulation
F. Santagata; J.F. Creemer; E. Iervolino; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 22, Issue 10, Sep. 2012. DOI 10.1088/0960-1317/22/10/105025. - Mechanical design and characterization for MEMS thin-film packaging
F. Santagata; J.J.M. Zaal; V.G. Huerta; L. Mele; J.F. Creemer; P.M. Sarro;
Journal of Microelectromechanical Systems,
Volume 21, Issue 1, pp. 100-109, Feb. 2012. DOI 10.1109/JMEMS.2011.2170817. - Stiction-driven sealing of surface micromachined channels
B. Morana; G. Pandraud; F. Santagata; J.F. Creemer; P.M. Sarro;
In 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012),
Paris, France, IEEE, pp. 329-332, Jan. 2012. ISBN 978-978-1-4673-0325-5; DOI 10.1109/MEMSYS.2012.6170202. - A novel approach for piezoresistivity characterization of silicon nanowires
M. Nie; F. Santagata; T. Moh; Q.-A. Huang; P.M. Sarro;
In Proc. 11th IEEE Sensors Conference,
Taipei, Taiwan, pp. 1747-1750, Oct 2012. - Fully back-end TSV process by Cu electro-less plating for 3D smart sensor systems
F. Santagata; G. Fiorentino; M. Nie; C. Farriciello; R. Poelma; GuoQi Zhang; P.M. Sarro;
In Proc. 11th IEEE Sensors Conference,
Taipei, Taiwan, pp. 668-671, Oct 2012. - An analytical model and verification for MEMS Pirani gauges
F. Santagata; E. Iervolino; L. Mele; A.W. van Herwaarden; J.F. Creemer; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 21, Issue 11, pp. 1-7, 2011. DOI 10.1088/0960-1317/21/11/115007. - A tube-shaped buried Pirani gauge for low detection limit with small footprint
F. Santagata; J.F. Creemer; E. Iervolino; L. Mele; A.W. van Herwaarden; P.M. Sarro;
IEEE Journal of Microelectromechanical Systems,
Volume 20, Issue 3, pp. 676-684, Jun. 2011. DOI 10.1109/JMEMS.2011.2127457. - Low temperature encapsulation of nanochannels with water inside
C. Shen; V.R.S.S. Mokkapati; F. Santagata; A. Bossche; P.M. Sarro;
In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 854-857, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969464. - Sputtered molybdenum as conductive material for high-temperature microhotplates
L. Mele; F. Santagata; E. Iervolino; M. Mihailovic; T. Rossi; A.T. Tran; H. Schellevis; J.F. Creemer; P.M. Sarro;
In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 2690-2693, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969500. - Self-cleaning mass calibration of a thermogravimetric device using a thin-film molybdenum
E. Iervolino; L. Mele; F. Santagata; A.W. van Herwaarden; W. van der Vlist; J.F. Creemer; P.M. Sarro;
In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 1038-1041, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969167. - Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity
L. Mele; T. Rossi; M. Riccio; E. Iervolino; F. Santagata; A. Irace; G. Breglio; J.F. Creemer; P.M. Sarro;
In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
Athens, Greece, Procedia Engineering, pp. 387-390, Sep. 2011. DOI 10.1016/j.proeng.2011.12.096. - An all-in-one nanoreactor for high-resolution microscopy on nanomaterials at high pressures
J.F. Creemer; F. Santagata; B. Morana; L. Mele; T. Alan; E. Iervolino; G. Pandraud; P.M. Sarro;
In Proc. 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011),
Cancun, Mexico, IEEE, pp. 1103-1106, Jan. 2011. ISBN 978-1-4244-9633-4; DOI 10.1109/MEMSYS.2011.5734622. - A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM
B. Morana; F. Santagata; L. Mele; M. Mihailovic; G. Pandraud; J.F. Creemer; P.M. Sarro;
In 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011),
Cancun, Mexico, IEEE, pp. 380-383, Jan. 2011. ISBN 978-1-4244-9633-4; DOI 10.1109/MEMSYS.2011.5734441. - Co-design of wafer level thin film package assembly
J.J.M. Zaal; F. Santagata; W.D. van Driel; GuoQi Zhang; J.F. Creemer; P.M. Sarro;
In 12th Internat. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments Microelectronics and Microsystems (EuroSimE 2011),
Linz, Austria, pp. 1-6, Apr. 2011. ISBN 978-1-4577-0106-1.
document - Method of manufacturing a micro unit and micro unit for use in a microscope
J.F. Creemer; G. Pandraud; F. Santagata;
Patent No. WO2011019276, Feb. 2011. - Mechanical robustness and hermeticity monitoring for MEMS thin film encapsulation
F. Santagata;
PhD thesis, Delft University of Technology, Dec. 2011. ISBN 978-90-8570-759-2; Promotor: prof.dr. P.M. Sarro. - Wafer-level assembly and sealing of a MEMS nanoreactor for in situ microscopy
L. Mele; F. Santagata; G. Pandraud; B. Morana; F. D. Tichelaar; J. F. Creemer; P. M. Sarro;
J. Micromech. Microeng.,
Volume 20, 2010. - A novel 3-D tube-shaped buried poly-Si Pirani gauge for extended dynamic range with small footprint
Santagata; F.; E. Iervolino; Laros; J.M.W.; Groeneweg; J.; Creemer; J.F.; van Herwaarden; A.W.; P.M. Sarro and;
In Y. Suzuki; Man Wong (Ed.), Proceedings of IEEE MEMS 2010 Conference,
Wanchai, Hong Kong, IEEE, pp. 643-646), 2010. - LPCVD amorphous SiCx for freestanding electron transparent windows
B. Morana; J.F. Creemer; F. Santagata; C.C. Fan; H.T.M. Pham; G. Pandraud; F.D. Tichelaar; P.M. Sarro;
In Y. Suzuki; Man Wong (Ed.), Proceedings of IEEE MEMS 2010 Conference,
Wanchai, Hong Kong, IEEE, pp. 572-575), 2010. - Wafer Level Encapsulation Techniques for a MEMS Microreactor with integrated Heat Exchanger
F. Santagata; L. Mele; M. Mihailovic; B. Morana; J.F. Creemer; P.M. Sarro;
In Proceedings of IEEE Sensors 2009 Conference,
Christchurch, New Zealand, pp. 799-802, 2009.
document - Thin-film encapsulation of a silicon field emission electron source
F. Santagata; C.K. Yang; J.F. Creemer; P.M. Sarro;
In s.n. (Ed.), Proceedings Eurosensors XXII,
Dresden, Germany: Eurosensors XXII, pp. 625-628, 2008.
document - Electrothermal Effects in Bipolar Differential Pairs
L. La Spina; V. d'Alessandro; F. Santagata; N. Rinaldi; L. K. Nanver;
In Proc. IEEE BCTM,
Boston, USA, pp. 131-134, Oct. 2007.