Cascade Summit probe station (CAS31) w. B1500A

Topic: Probe stations for wafer-scale and single die DC measurements

Cascade Summit 12000 probe station with the following specifications:

  • Probe needles: 6
  • Stainless steel chuck with bias option, max 6" wafers
  • Default analyzer: B1500A with 6 HRSMU's
  • Room temperature operation
  • Can be modified to fit 2 RF probes

Repository data

Type: lab infrastructure
Date: April 2020
Contact: Sten Vollebregt