Cascade Summit probe station (CAS34) w. E5270B and/or HP4294A
Topic: Probe stations for wafer-scale and single die DC measurements
Cascade probe station with the following specifications:
- Probe needles: 6
- Stainless chuck with bias option, max 8" wafers
- Default analyzer: E5270B with 6x E5287A HRSMU
- Optional HP4294A Precision Impedance Analyzer, 40 Hz to 110 MHz
- With downflow unit for low-dust environment
Repository data
| Type: | lab infrastructure |
|---|---|
| Date: | April 2020 |
| Contact: | Sten Vollebregt |