Carbon nanotube and atomic layer based solid-state supercapacitors (CNT-ALD)Themes: MEMS Technology
Super capacitors can be used to quickly store large amount of energy in order to stabilize on-chip power supplies and in the future replace batteries. Due to their large surface area per volume carbon nanotubes have been proposed for many super capacitor applications. In this project we investigate solid-state supercapacitors based on CNT and atomic layer deposition for the dielectric and conuter electrode deposition. Due to the solid-state nature of these capacitors they can easily be integrated into semiconductor technology.