Marko Mihailovic
Publications
- A molybdenum MEMS microhotplate for high-temperature operation
L. Mele; F. Santagata; E. Iervolino; M. Mihailovic; T. Rossi; A.T. Tran; H. Schellevis; J.F. Creemer; P.M. Sarro;
Sensors and Actuators A,
2012. DOI 10.1016/j.sna.2011.11.023. - MEMS silicon-based micro-evaporator
M. Mihailovic; C.M. Rops; J. Hao; L. Mele; J.F. Creemer; P.M. Sarro;
Journal of Micromechanics and Microengineering,
Volume 21, Issue 7, pp. 1-9, 2011. DOI 10.1088/0960-1317/21/7/075007. - Sputtered molybdenum as conductive material for high-temperature microhotplates
L. Mele; F. Santagata; E. Iervolino; M. Mihailovic; T. Rossi; A.T. Tran; H. Schellevis; J.F. Creemer; P.M. Sarro;
In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 2690-2693, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969500. - MEMS silicon-based resistojet micro-thruster for attitude control of nano-satellites
M. Mihailovic; T.V. Mathew; J.F. Creemer; B.T.C. Zandbergen; P.M. Sarro;
In of 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
Beijing, China, pp. 262-265, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969432. - A silicon-based MEMS resistojet for propelling cubesats
T.V. Mathew; B.T.C. Zandbergen; M. Mihailovic; J.F. Creemer; P.M. Sarro;
In Proc. 62nd International Astronautical Congress,
Cape Town, South Africa, pp. 1-8, Oct. 2011. - A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM
B. Morana; F. Santagata; L. Mele; M. Mihailovic; G. Pandraud; J.F. Creemer; P.M. Sarro;
In 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011),
Cancun, Mexico, IEEE, pp. 380-383, Jan. 2011. ISBN 978-1-4244-9633-4; DOI 10.1109/MEMSYS.2011.5734441. - MEMS monocrystalline-silicon based thermal devices for chemical and microfluidic applications
M. Mihailovic;
PhD thesis, Delft University of Technology, Jun. 2011. ISBN 978-90-5335-430-8; Promotor: prof.dr. P.M. Sarro. - Design and Development of an Ultra Compact Silicon Phase-Change Heat Exchanger
Rops; C M; M. Mihailovic; P.M. Sarro;
In Proceedings of the 2nd European Conference Microfluidics,
Toulouse, France, Dec. 2010. - MEMS Silicon-Based Micro-Evaporator with Diamond-Shaped Fins
M. Mihailovic; C. Rops; J.F. Creemer; P.M. Sarro;
In Proceedings of EUROSENSORS XXIV,
Linz, Austria, Sep. 2010. - Electrical characterization of TiSi/TiN layer stack in temperature range from 0 � 500 �C
M. Mihailovic; J.F. Creemer; P.M. Sarro;
In Proceedings of 13th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE),
Veldhoven, The Netherlands, pp. 114-117, 2010. - Wafer Level Encapsulation Techniques for a MEMS Microreactor with integrated Heat Exchanger
F. Santagata; L. Mele; M. Mihailovic; B. Morana; J.F. Creemer; P.M. Sarro;
In Proceedings of IEEE Sensors 2009 Conference,
Christchurch, New Zealand, pp. 799-802, 2009.
document - Silicon-based MEMS micro-evaporator
J. Hao; M. Mihailovic; C.M. Rops; J.F. Creemer; P.M. Sarro;
In Proceedings of 20th Micromechanics Europe Workshop (MME),
Toulouse, France, pp. 1-4, 2009.
document - Sheet resistance of As-doped monocrystalline silicon in temperature range up to 1100 K
M. Mihailovic; J.F. Creemer; P.M. Sarro;
In Proceedings of 12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE),
Veldhoven, The Netherlands, pp. 36-39, 2009.
document - HEAT TRANSFER ENHANCEMANT USING FIN STRUCTURES: ULTRA-COMPACT HEAT EXCHANGER DESIGN
C.M. Rops; J. Hao; R. Lindken; M. Mihailovic; J.F. Creemer;
In 2nd european process intensification conference,
Venice, Italy, pp. 1-4, 2009. - Monocrystalline silicon microhotplate heater
M. Mihailovic; J.F. Creemer; P.M. Sarro;
In Proceedings of EUROSENSORS XXII,
Dresden, Germany, pp. 1611-1614, Sep. 2008. - Electrical behaviour of mono-Si based microhotplate heater
M. Mihailovic; J.F. Creemer; P.M. Sarro;
In Proceedings of 11th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE),
Veldhoven, The Netherlands, pp. 411-414, 2008. - Monocrystalline Si-based microhotplate heater
M. Mihailovic; J.F. Creemer; P.M. Sarro;
In Proc. SAFE/STW,
Veldhoven, The Netherlands, pp. 608-611, Nov. 2007.