researcher profile

Publications

  1. Effects of graphene defects on gas sensing properties towards NO2 detection
    Filiberto Ricciardella; Sten Vollebregt; Tiziana Polichetti; Mario Miscuglio; Brigida Alfano; Maria L. Miglietta; Ettore Massera; Girolamo Di Francia; Pasqualina M. Sarro;
    Nanoscale,
    Volume 9, pp. 6085-6093, 2017.
    document

  2. CVD transfer-free graphene for sensing applications
    Chiara Schiattarella; Sten Vollebregt; Tiziana Polichetti; Brigida Alfano; Ettore Massera; Maria Lucia Miglietta; Girolamo Di Francia; Pasqualina Maria Sarro;
    Beilstein Journal of Nanotechnology,
    Volume 8, pp. 1015-1022, 2017.
    document

  3. Effect of droplet shrinking on surface acoustic wave response in microfluidic applications
    Thu Hang Bui; Van Nguyen; Sten Vollebregt; Bruno Morana; Henk van Zeijl; Trinh Chu Duc; P.M. Sarro;
    Applied Surface Science,
    Volume 426, pp. 253-261, 2017.
    document

  4. Carbon Nanotubes as Vertical Interconnects for 3D Integrated Circuits
    Sten Vollebregt; Ryoichi Ishihara;
    In Carbon Nanotubes for Interconnects,
    Springer International Publishing, 2017.
    document

  5. Horizontally aligned carbon nanotube scaffolds for freestanding structures with enhanced conductivity
    Cinzia Silvestri; Federico Marciano; Bruno Morana; Violeta Podranovic; Sten Vollebregt; Kouchi Zhang; Pasqualina M Sarro;
    In Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on,
    pp. 266-269, 2017.

  6. Suspended graphene beams with tunable gap for squeeze-film pressure sensing
    S. Vollebregt; R.J. Dolleman; H.S.J. van der Zant; P.G. Steeneken; P.M. Sarro;
    In Proc.of Transducers 2017, the 19th International Conference on Solid-state Sensors, Actuators, and Microsystems,
    pp. 770-773, 2017.

  7. High sensitive CVD graphene-based gas sensors operating under environmental conditions
    Filiberto Ricciardella; Sten Vollebregt; Tiziana Polichetti; Brigida Alfano; Ettore Massera; Pasqualina M. Sarro;
    In Graphene Conference,
    2017.

  8. Low Temperature CVD Grown Graphene for Highly Selective Gas Sensors Working under Ambient Conditions
    Filiberto Ricciardella; Sten Vollebregt; Tiziana Polichetti; Brigida Alfano; Ettore Massera; Pasqualina M. Sarro;
    In Proceedings of Eurosensors 2017,
    pp. 445, 2017.
    document

  9. The Direct Growth of Carbon Nanotubes as Vertical Interconnects in 3D Integrated Circuits
    Sten Vollebregt; Ryoichi Ishihara;
    Carbon,
    Volume 96, pp. 332-338, 2016.
    document

  10. The growth of carbon nanotubes on electrically conductive ZrN support layers for through-silicon vias
    Sten Vollebregt; Sourish Banerjee; Frans D. Tichelaar; Ryoichi Ishihara;
    Microelectronic Engineering,
    Volume 156, pp. 126-130, 2016.
    document

  11. Stretchable Binary Fresnel Lens for Focus Tuning
    Xueming Li; Lei Wei; René H. Poelma; Sten Vollebregt; Jia Wei; Hendrik Paul Urbach; Pasqualina M. Sarro; Kouchi Zhang;
    Scientific Reports,
    Volume 6, pp. 25348, 2016.

  12. Thermal characterization of carbon nanotube foam using MEMS microhotplates and thermographic analysis
    Cinzia Silvestri; Michele Riccio; Rene Poelma; Bruno Morana; Sten Vollebregt; Fabio Santagata; Andrea Irace; Kouchi Zhang; Pasqualina M. Sarro;
    Nanoscale,
    Volume 8, pp. 8266-8275, 2016.
    document

  13. Fabrication and characterization of an Upside-down Carbon Nanotube (CNT) Microelectrode array (MEA)
    Gaio, N.; Silvestri, C.; van Meer, B.; Vollebregt, S.; Mummery, C.; Dekker, R.;
    IEEE Sensors Journal,
    Volume 16, Issue 24, pp. 8685, 2016.

  14. A transfer-free wafer-scale CVD graphene fabrication process for MEMS/NEMS sensors
    S. Vollebregt; B. Alfano; F. Ricciardella; A.J.M. Giesbers; Y. Grachova; H.W. van Zeijl; T. Polichetti; P.M. Sarro;
    In Proc. of the 29th IEEE International Conference of Micro Electro Mechanical Systems,
    pp. 17-20, 2016.

  15. A predefined wafer-scale CVD graphene deposition method requiring no transfer
    Sten Vollebregt; Lina Sarro;
    In Graphene Week,
    2016.

  16. High sensitive gas sensors realized by a transfer-free process of CVD graphene
    Filiberto Ricciardella; Sten Vollebregt; Tiziana Polichetti; Brigida Alfano; Ettore Massera; Lina Sarro;
    In Proceedings of the IEEE Sensors conference,
    2016.

  17. Impact of the atomic layer deposition precursors diffusion on solid-state carbon nanotube based supercapacitors performances
    G Fiorentino; S Vollebregt; FD Tichelaar; R Ishihara; PM Sarro;
    IOP Nanotechnology,
    Volume 26, Issue 6, pp. 064002, 2015.
    document

  18. Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
    S. Vollebregt; R. Ishihara;
    Journal of Visual Experiments,
    Volume 106, pp. e53260, 2015.
    document

  19. Carbon nanotubes TSV grown on an electrically conductive ZrN support layer
    Sten Vollebregt; Sourish Banerjee; Frans D. Tichelaar; Ryoichi Ishihara;
    In IEEE International Interconnect Technology Conference,
    pp. 281-283, 2015.

  20. Molybdenum grown CVD graphene Schottky diodes
    S. Vollebregt; F. Ricciardella; Y. Grachova; T. Polichetti; P.M. Sarro;
    In Graphene Week,
    2015.

  21. Tunable binary fresnel lens based on stretchable PDMS/CNT compsite
    Xueming Li; L. Wei; S. Vollebregt; R. Poelma; Y. Shen; Jia Wei; P. Urbach; P.M. Sarro; Kouchi Zhang;
    In Transducers,
    pp. 2041-2044, 2015.

  22. The Role of Edge Defects in Liquid Phase Exfoliated and Chemical Vapor Deposited Graphene for NO2 Detection
    F Ricciardella; S Vollebregt; T Polichetti; B Alfano; PM Sarro; ML Miglietta; E Massera; G Di Francia;
    In GraphITA,
    2015.

  23. Crystallinity variations over the length of vertically aligned carbon nanotubes grown by chemical vapour deposition
    S. Vollebregt; P. Padmanabhan; C. Silvestri; P.M. Sarro;
    In 41st Micro and Nano Engineering conference,
    2015.

  24. Upside-down Carbon Nanotube (CNT) Micro-electrode Array (MEA)
    N. Gaio; B. van Meer; C. Silvestri; Saeed Khoshfetrat Pakazad; S. Vollebregt; C.L. Mummery; R. Dekker;
    In IEEE Sensors Conference,
    2015.

  25. Tailoring the Mechanical Properties of High-Aspect-Ratio Carbon Nanotube Arrays using Amorphous Silicon Carbide Coatings
    Poelma, RH; Morana, Bruno; Vollebregt, Sten; Schlangen, Erik; van Zeijl, HW; Fan, Xuejun; Zhang, Kouchi;
    Advanced Functional Materials,
    Volume 24, Issue 36, pp. 5737-5744, 2014.
    document

  26. Failure Analysis and Reliability of Low-Temperature-Grown Multi-Wall Carbon Nanotube Bundles Integrated as Vias in Monolithic Three-Dimensional Integrated Circuits
    Chiaramonti, Ann N; Vollebregt, Sten; Sanders, Aric W; Ishihara, Ryoichi; Read, David T;
    Microsc. Microanal,
    Volume 20, pp. 1762-1763, 2014.

  27. Carbon nanotube vertical interconnects fabricated at temperatures as low as 350 °C
    Vollebregt, Sten; Tichelaar, FD; Schellevis, H; Beenakker, CIM; Ishihara, R;
    Carbon,
    Volume 71, pp. 249--256, 2014.

  28. Dominant thermal boundary resistance in multi-walled carbon nanotube bundles fabricated at low temperature
    Vollebregt, Sten; Banerjee, Sourish; Chiaramonti, Ann N; Tichelaar, Frans D; Beenakker, Kees; Ishihara, Ryoichi;
    Journal of Applied Physics,
    Volume 116, Issue 2, pp. 023514, 2014.

  29. Carbon Nanotube Vertical Interconnects: Prospects and Challenges
    Vollebregt, S; Beenakker, CIM; Ishihara, R;
    In Micro-and Nanoelectronics: Emerging Device Challenges and Solutions,
    CRC Press, 2014.

  30. CNT bundles growth on microhotplates for direct measurement of their thermal properties
    C. Silvestri; B. Morana; G. Fiorentino; S. Vollebregt; G. Pandraud; F. Santagata; Kouchi Zhang; P.M. Sarro;
    In 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014),
    San Francisco, USA, Jan. 2014.
    document

  31. 3D solid-state supercapacitors obtained by ALD coating of high-density carbon nanotubes bundles
    Fiorentino, Giuseppe; Vollebregt, Sten; Tichelaar, FD; Ishihara, Ryoichi; Sarro, Pasqualina M;
    In Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on,
    IEEE, pp. 342--345, 2014.

  32. High Quality Wafer-scale CVD Graphene on Molybdenum Thin Film for Sensing Application
    Yelena Grachova; Sten Vollebregt; Andrea Leonardo Lacaita; Pasqualina M. Sarro;
    In Procedia Engineering 87: EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers,
    pp. 1501-1504, 2014.
    document

  33. Carbon Nanotubes as Vertical Interconnects in 3D Integrated Circuits
    Sten Vollebregt;
    PhD thesis, Delft University of Technology, 2014.
    document

  34. Towards the integration of carbon nanotubes as vias in monolithic three-dimensional integrated circuits
    S. Vollebregt; Chiaramonti; AN; J. van der Cingel; C.I.M. Beenakker; R. Ishihara;
    Japanese Journal of Applied Physics. Part 1, Regular Papers Brief Communications & Review Papers,
    Volume 52, Issue 1-5, 2013.

  35. Thermal conductivity of low temperature grown vertical carbon nanotube bundles measured using the three-ω method.
    S. Vollebregt; S. Banerjee; C.I.M. Beenakker; R. Ishihara;
    Applied Physics Letters,
    Volume 102, Issue 19, pp. 1-4, 2013.

  36. Size-Dependent Effects on the Temperature Coefficient of Resistance of Carbon Nanotube Vias
    Vollebregt, Sten; Banerjee, Sourish; Beenakker, Kees; Ishihara, Ryoichi;
    Electron Devices, IEEE Transactions on,
    Volume 60, Issue 12, pp. 4085--4089, 2013.

  37. Carbon Nanotubes as Interconnects in Integrated Circuits
    Vollebregt, S; Ishihara, R; Beenakker, CIM;
    In Dekker Encyclopedia of Nanoscience and Nanotechnology, Second Edition,
    Taylor and Francis, 2013.

  38. Integrating low temperature aligned carbon nanotubes as vertical interconnects in Si technology
    Sten Vollebregt; Ryoichi Ishihara; Jaber J. Derakhshandehohan van der Cingel; Hugo Schellevis; C.I.M. Beenakker;
    In Nanoelectronic Device Applications Handbook,
    Taylor and Francis, 2013.

  39. Carbon Nanotube based heat-sink for solid state lighting
    F. Santagata; G. Almanno; S. Vollebregt; C Silvestri; Kouchi Zhang; P.M. Sarro;
    In 8th IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems (NEMS),
    pp. 1214-1217, Apr 2013. DOI 10.1109/NEMS.2013.6559937.

  40. Carbon nanotube vias fabricated at back-end of line compatible temperature using a novel CoAl catalyst
    S. Vollebregt; H. Schellevis; C.I.M. Beenakker; R. Ishihara;
    In S. Ogawa (Ed.), IEEE International Interconnect Technology Conference-technical papers,
    Kyoto, Japan, Jun. 2013.

  41. Influence of the growth temperature on the first and second-order Raman band ratios and widths of carbon nanotubes and fibers
    S. Vollebregt; R. Ishihara; F.D. Tichelaar; Y. Hou; C.I.M. Beenakker;
    Carbon,
    Volume 50, Issue 10, pp. 3542-3554, Aug. 2012. DOI 10.1016/j.carbon.2012.03.026.

  42. Contact resistance of low-temperature carbon nanotube vertical interconnects
    S. Vollebregt; A.N. Chiaramonti; R. Ishihara; H. Schellevis; C.I.M. Beenakker;
    In K. Jiang (Ed.), 2012 12th IEEE Conference on Nanotechnology (IEEE-NANO),
    Birmingham, UK, Aug. 2012. ISBN 978-1-4673-2198-3; DOI 10.1109/NANO.2012.6321985.

  43. Multilayer conformal coating of highly dense Multi-Walled Carbon Nanotubes bundles
    G. Fiorentino; S. Vollebregt; R. Ishihara; P.M. Sarro;
    In 2012 12th IEEE Conference on Nanotechnology (IEEE-NANO),
    Birmingham, UK, Aug. 2012. ISBN 978-1-4673-2198-3; DOI 10.1109/NANO.2012.6322054.

  44. Low-temperature bottom-up integration of carbon nanotubes for vertical interconnects in monolithic 3D integrated circuits
    S. Vollebregt; R. Ishihara; J. van der Cingel; C.I.M. Beenakker;
    In 3rd IEEE International 3D Systems Integration Conference (3DIC 2011),
    Osaka, Japan, Jan. 2012. DOI 10.1109/3DIC.2012.6262989.

  45. Electrical characterization of carbon nanotube vertical interconnects with different lengths and widths
    S. Vollebregt; R. Ishihara; F.D. Tichelaar; J. van der Cingel; C.I.M. Beenakker;
    In IEEE International Interconnect Technology Conference (IITC 2012),
    San Jose, CA, USA, pp. 1-3, Jun. 2012. DOI 10.1109/IITC.2012.6251578.

  46. Integrating carbon nanotubes as vias in a monolithic 3DIC process
    S. Vollebregt; R. Ishihara; A.N. Chiaramonti; J. van der Cingel; C.I.M. Beenakker;
    In Proc. International Conference on Solid State Devices and Materials (SSDM 2012),
    Kyoto, Japan, pp. 1170-1171, Sep 2012.

  47. Patterned aligned carbon nanotubes for vertical interconnects in 3D integrated TFT circuits
    S. Vollebregt; R. Ishihara; J. J. Derakhshandeh. van der Cingel; W.H.A. Wien; C.I.M. Beenakker;
    In 7th International Thin-Film Transistor Conference,
    Cambridge, United Kingdom, Mar. 2011.

  48. Integrating low temperature aligned carbon nanotubes as vertical interconnects in Si technology
    S. Vollebregt; R. Ishihara; J. J. Derakhshandeh. van der Cingel; H. Schellevis; C.I.M. Beenakker;
    In Proc. 11th IEEE International Conference on Nanotechnology (NANO 2011),
    Portland, OR, pp. 985-990, Aug. 2011.

  49. Use of multi-wall carbon nanotubes as an absorber in a thermal detector
    H. Wu; S. Vollebregt; A. Emadi; G. de Graaf; R. R. IshiharaF. Wolffenbuttel;
    In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
    Athens, Greece, Procedia Engineering, pp. 523-526, Sep. 2011. DOI 10.1016/j.proeng.2011.12.130.

  50. Electrical characterisation of low temperature aligned carbon nanotubes for vertical interconnects
    S. Vollebregt; R. Ishihara; J. van der Cingel; H. Schellevis; C.I.M. Beenakker;
    In Proc. ICT.OPEN: Micro technology and micro devices (SAFE 2011),
    Veldhoven, The Netherlands, Nov. 2011.

  51. Growth of high density aligned carbon nanotubes using palladium as catalyst
    S. Vollebregt; J. Derakhshandeh; R. Ishihara; M. Y. Wu; C. I. M. Beenakker;
    Journal of Electronic Materials,
    Volume 39, Issue 4, pp. 371-375, 2010.

  52. Patterned growth of carbon nanotubes for vertical interconnect in 3D integrated circuits
    S. Vollebregt; R. Ishihara; J. Derakhshandeh; W. Wien; J. van der Cingel; C.E.M. Beenakker;
    In Proc. of SAFE 2010,
    pp. 184-187, 2010.

  53. Growth of high density aligned carbon nanotubes using palladium as catalyst
    S. Vollebregt; J. Derakhshandeh; R. Ishihara; C.I.M. Beenakker;
    In Proceedings of Electronic Material conference 2009,
    USA, 2009.

  54. Investigating Low Temperature High Density Aligned Carbon Nanotube and Nanofilament Growth using Palladium as Catalyst
    S. Vollebregt; J. Derakhshandeh; M.Y. Wu; R. Ishihara; C.I.M. Beenakker;
    In SAFE 2009,
    STW, pp. 125-128, 2009.

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