Infrastructure

Within the department a broad range of measurement capabilities are available. Below a list of measurement equipment that are primarily used by our group. For an overview of the cleanroom capabilities within the faculty please check the Else Kooi Lab

General

Probe stations for wafer-scale and single die DC measurements

Number of items: 4

Special (sensor) characterization setups

Number of items: 5

Micro/Nano System Integration and Reliability

Reliability measurement setups

Number of items: 2