ET4icp IC technology lab

Topics: EKL clean room experience in processing bipolar transistors
During several half days students will have the opportunity to gain experience in the process- and device-simulation of a CMOS transistor. They will perform several processing steps in the EKL clean room and will measure and characterize the fabricated device.

Study Goals

Basic understanding of IC Technology concepts, processing and measurement.

Start date: 19th of April, 8:45-12:00, EKL colloquium room (DI 01.180)

Teachers Sten Vollebregt

Integration of graphene and carbon nanotubes in semiconductor technology

Last modified: 2016-03-29


Credits: 2 EC
Period: 28 hrs