ET4icp IC technology lab

Topics: Hands-on experience on process simulations, fabrication in the EKL cleanroom and measurement on the fabricated devices
During several half days students will have the opportunity to gain experience in the process- and device-simulation of a CMOS transistor. They will perform several processing steps in the EKL clean room and will measure and characterize the fabricated device.

Study Goals

Basic understanding of IC Technology concepts, processing and measurement.

Teachers

dr.ir. Sten Vollebregt

Emerging Electronic Materials

Last modified: 2017-12-14

Details

Credits: 2 EC
Period: 28 hrs
Contact: Sten Vollebregt