dr.ir. L.M. Middelburg

PhD student
Electronic Components, Technology and Materials (ECTM), Department of Microelectronics

PhD thesis (Oct 2020): From Silicon toward Silicon Carbide Smart Integrated Sensors
Promotor: GuoQi Zhang

Expertise: WBG materials for sensor applications

Themes: Micro/Nano System Integration and Reliability


Luke Middelburg was born in De Lier, The Netherlands, in 1993. He received the B.E. degree in Electrical Engineering in 2014 and the Master degree in Microelectronics in 2016, both at Delft University of Technology. In 2015 he joined the department of Electronic Instrumentation to work on the Ford Poling Challenge in the framework of the master thesis work. Currently he is working in the department of Electronic Components, Technology and Materials (ECTM) in the Else Kooi Laboratory, in the group of professor Kouchi Zhang. His main research topics are Wide Bandgap Semiconductor Sensors, harsh environment sensing and health monitoring.


  1. Surface-micromachined Silicon Carbide Pirani Gauges for Harsh Environments
    Jiarui Mo; Luke Middelburg; Bruno Morana; H.W. Van Zeijl; Sten Vollebregt; GuoQi Zhang;
    IEEE Sensors Letters,
    Volume 21, Issue 2, pp. 1350-1358, 2021. DOI: 10.1109/JSEN.2020.3019711

  2. From bioethanol containing fuels towards a fuel economy that includes methanol derived from renewable sources and the impact on European Union decision-making on transition pathways
    T. B. Bonenkamp; L. M. Middelburg; M. O. Hosli; R. F. Wolffenbuttel;
    Renewable and Sustainable Energy Review,
    Volume 120, pp. 109667, 2020. DOI: https://doi.org/10.1016/j.rser.2019.109667

  3. Exploring the response of a resistive soot sensor to AC electric excitation
    L.M. Middelburg; M. Ghaderi; D. Bilby; J.H. Visser; R.F. Wolffenbuttel;
    Journal of Aerosol Science,
    2020. DOI: https://doi.org/10.1016/j.jaerosci.2020.105568

  4. Maintaining Transparency of a Heated MEMS Membrane for Enabling Long-Term Optical Measurements on Soot-Containing Exhaust Gas
    Luke M. Middelburg; Mohammadamir Ghaderi; David Bilby; Jaco H. Visser; GuoQi Zhang; Per Lundgren; Peter Enoksson; Reinoud F. Wolffenbuttel;
    MDPI Sensors,
    Volume 20, 2020. DOI: https://doi.org/10.3390/s20010003

  5. Toward a Self-Sensing Piezoresistive Pressure Sensor for all-SiC Monolithic Integration
    L.M. Middelburg; H.W. van Zeijl; S. Vollebregt; B. Morana; GuoQi Zhang;
    IEEE Sensors,
    Volume 20, Issue 19, pp. 11265-11274, 2020. DOI: 10.1109/JSEN.2020.2998915

  6. Low power AlGaN/GaN MEMS pressure sensor for high vacuum application
    Jianwen Sun; Dong Hu; Zewen Liu; Luke Middelburg; Sten Vollebregt; Pasqualina M. Sarro; Guoqi Zhang;
    Sensors and Actuators A: Physical,
    Volume 314, pp. 112217, 2020.

  7. From Si Towards SiC Technology for Harsh Environment Sensing
    L. M. Middelburg; W. D. van Driel; GuoQi Zhang;
    Springer International Publishing, , 2020. DOI: 10.1007/978-3-030-16577-2_1

  8. Health Monitoring for Lighting Applications
    W. D. van Driel; L. M. Middelburg; B. El Mansouri; B. J. C. Jacobs;
    Springer, , 2020.

  9. Impedance Spectroscopy for Enhanced Data Collection of Conductometric Soot Sensors
    Middelburg, L. M.; Ghaderi, M.; Bilby, D.; Visser, J. H.; GuoQi Zhang; Wolffenbuttel, R. F.;
    In IEEE 29th International Symposium on Industrial Electronics (ISIE),
    pp. 1099-1103, 2020. DOI: 10.1109/ISIE45063.2020.9152484

  10. Self-Cleaning Micro-Windows for In-Tailpipe Optical Exhaust Gas Measurements
    Ghaderi, A.; Middelburg, L. M.; Bilby, D.; Visser, J. H.; Lundgren, P.; Enoksson, P.; Wolffenbuttel, R. F.;
    In IEEE 29th International Symposium on Industrial Electronics (ISIE),
    pp. 1104-1108, 2020. DOI: 10.1109/ISIE45063.2020.9152437

  11. From Silicon toward Silicon Carbide Smart Integrated Sensors
    Luke Middelburg;
    PhD thesis, Delft University Technology, 2020.

  12. High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout
    Brahim El Mansouri; Luke M. Middelburg; Rene H. Poelma; GuoQi Zhang; Henk W. van Zeijl; Jia Wei; Hui Jiang; Johan G. Vogel; Willem D. van Driel;
    Microsystems & Nanoengineering,
    Volume 5, 2019.

  13. Tomorrow’s advanced packaging; for electronics and heterogeneous system integration
    H. Yi; A. M. Gheytaghi; B. El Mansouri; L.M. Middelburg; GuoQi Zhang;
    ETV Maxwell,
    Volume 21.2, 2018.

  14. Designing a 100 [aF/nm] capacitive transducer
    L. M. Middelburg; B. El Mansouri; R. H. Poelma; H. W. van Zeijl; Jia Wei; GuoQi Zhang; W. D. van Driel;
    In 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE),

  15. Non-Linear Bulk Micromachined Accelerometer for High Sensitivity Applications
    Middelburg, L. M.; Mansouri, B. E.; Poelma, R.; GuoQi Zhang; Van Zeijl, H.; Wei, J.;
    In Proc. IEEE Sensors,
    2018. DOI: https://doi.org/10.1109/ICSENS.2018.8589630

  16. Multi-domain spectroscopy for composition measurement of water-containing bio-ethanol fuel
    L.M. Middelburg; G. de Graaf; A. Bossche; J.Bastemeijer; M. Ghaderi; F.S. Wolffenbuttel; J. Visser; R. Soltis; R.F. Wolffenbuttel;
    Fuel Processing Technology,
    Volume 167, pp. 127-135, 2017.

  17. High aspect ratio spiral resonators for process variation investigation and MEMS applications
    L. Middelburg; B. El Mansouri; H. van Zeijl; GuoQi Zhang; R. H. Poelma;
    In Proc. IEEE Sensors,

  18. Combining impedance spectroscopy with optical absorption spectroscopy in the UV for biofuel composition measurement
    Luke Middelburg; Mohammadamir Ghaderi; Andre Bossche; Jeroen Bastemeijer; Ger de Graaf; Reinoud Wolffenbuttel;
    In Instrumentation and Measurement Technology Conference (I2MTC), 2017 IEEE International,

  19. Prognostics \& health management for LED-based applications
    W.D. van Driel; B. Jacobs; D. Schenkelaars; M. Klompenhouwer; R. Poelma; B. El Mansouri; L.M. Middelburg;
    In Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2017 18th International Conference on,

  20. Smart Systems Integration in the era of Solid State Lighting
    GuoQi Zhang; H. van Zeijl; W.D. van Driel; R. Poelma; Z.K. Esfahani; M.R. Venkatesh; L. Middelburg; B. El Mansouri;
    In Smart System Integration conference (SSI),

  21. Optical Spectroscopy for Biofuel Composition Sensing
    L.M. Middelburg; G. de Graaf; M. Ghaderi; A.Bossche; J. Bastemeijer; J.H. Visser; R.E. Soltis; R.F. Wolffenbuttel;
    In Procedia Engineering (Eurosensors 2016),
    pp. 55-58, 2016.

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Last updated: 12 Oct 2020

Luke Middelburg

  • Left in 2020
  • Now: Robert Bosch GmbH, Germany

MSc students