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Electronic Components, Technology and Materials

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Electronic Components, Technology and Materials
Department of Microelectronics
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Tom Salden

SiC pressure sensor for the range 80Pa to 1MPa

MSc thesis: Design, Production and Characterisation of an LPCVD-Based Poly-Silicon Carbide Pressure Sensor for Extreme Environments
Advisor(s): GuoQi Zhang, Brahim Mansouri

Program: MSc Microelectronics

Tom Salden, MSc

Electronic Components, Technology and Materials

TU Delft
Fac. EEMCS
Mekelweg 4
2628 CD Delft

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