Bingyan Xu

Optimization of a plasma etching machine for failure analysis of semiconductors                      

• Develop plasma etching test setup

• Design and conduct experiments on optimizing the plasma etching rate, etching area and etching selectivity of the MIP machine

• Design and conduct experiments to study the fundamentals of the relevant plasma etching                                                                                        

MSc thesis: Optimization of a plasma etching machine for failure analysis of semiconductors
Advisor(s): Jiaqi Tang, GuoQi Zhang

Program: MSc Microelectronics