ET4icp IC technology lab

Topics: Hands-on experience on process simulations, fabrication in the EKL cleanroom and measurement on the fabricated devices

During several half days students will have the opportunity to gain experience in the process- and device-simulation of a CMOS transistor. They will perform several processing steps in the EKL clean room and will measure and characterize the fabricated device.

Study Goals

Basic understanding of IC Technology concepts, processing and measurement.

Teachers Sten Vollebregt

Graphene, carbon nanotubes, sensors, nanoparticles, wide bandgap semiconductors

Last modified: 2023-11-04


Credits: 2 EC
Period: 0/0/0/2
Contact: Sten Vollebregt