Resonant Lorentz Force MEMS Magnetometer with Picotesla Sensitivity

Magnetic field sensors have numerous industrial, biomedical, and consumer applications such as magnetic resonance imaging (MRI), magnetic anomaly detection, mineral prospecting, magnetic compass for GPS navigation systems, and automotive sensors.

Lorentz force is the force acting on a current carrying conductor in presence of a magnetic field. Different detection mechanisms can be used to turn this force into an electrical signal. One of the main challenges for such sensors is the relatively small amplitude of Lorentz force, especially when targeting magnetic fields in the μT range and below. The limit of detection for such sensors is simply not sufficient for most applications, especially for power grid.

To address the existing challenges, we propose to develop a resonant Lorentz force MEMS magnetometer with picotesla sensitivity based on silicon-on-insulator or silicon carbide-on-insulator platform. A thermal-piezoresistive resonator will be designed and optimized by simulation to achieve a high quality factor. The MEMS magnetometer will be fabricated by MEMS processing in the cleanroom. Finally, the performance of the magnetometer will be tested by a Lorentz force measurement setup.

Assignment

Research contents:

• Resonator structure design and optimization
• MEMS magnetometer fabrication and characterization in the cleanroom
• Lorentz force measurement setup and calibration 

Contact

Last modified: 2022-04-11