Cascade Summit probe station (CAS31) w. B1500A
Topic: Probe stations for wafer-scale and single die DC measurements
Cascade Summit 12000 probe station with the following specifications:
- Probe needles: 6
- Stainless steel chuck with bias option, max 6" wafers
- Default analyzer: B1500A with 6 HRSMU's
- Room temperature operation
- Can be modified to fit 2 RF probes
Repository data
| Type: | lab infrastructure |
|---|---|
| Date: | April 2020 |
| Contact: | Sten Vollebregt |