Probe stations for wafer-scale and single die DC measurements
Contact: Sten Vollebregt
Measurement infrastructure to perform electrical and electro-thermal characterisation of unpackaged dies and wafers using probe needles. Measurement equipment includes semiconductor parameter analyzers, precision LCR meters and other various equipment. The setups can be controlled through IC-CAP.Items under this topic
Cascade Summit probe station (CAS33) w. B1500A and/or E4980ASemi-automatic probe station with 6 probe needles connected to a HP4156C semiconductor parameter analyzer and/or HP4284A LCR meterLab infrastructure, Apr 2020 |
Cascade Summit probe station (CAS34) w. E5270B and/or HP4294ASemi-automatic probe station with 6 probe needles connected to a E5270B precision IV analyzer w. 6 E5287A HRSMU cards and/or HP4294A precision impedance analyzerLab infrastructure, Apr 2020 |
Manual probe station w. HP4156CLab infrastructure, Apr 2020 |
Cascade Summit probe station (CAS31) w. B1500ASemi-automatic probe station with 6 probe needles connected to a B1500A semiconductor parameter analyzerLab infrastructure, Apr 2020 |
