Cascade Summit probe station (CAS33) w. B1500A and/or E4980A

Topic: Probe stations for wafer-scale and single die DC measurements

Cascade Summit 12000 probe station with the following specifications:

  • Probe needles: 6 (7 possible)
  • Goldplated chuck with bias option, max 6" wafers
  • Default analyzer: B1500A with 4x HRSMU and 2x HPSMU
  • Optional E4980A Precision LCR Meter, 20 Hz to 2 MHz
  • Chuck temperature from -40 to 200 C

Repository data

Type: lab infrastructure
Date: April 2020
Contact: Sten Vollebregt