Cascade Summit probe station (CAS33) w. B1500A and/or E4980A
Topic: Probe stations for wafer-scale and single die DC measurements
Cascade Summit 12000 probe station with the following specifications:
- Probe needles: 6 (7 possible)
- Goldplated chuck with bias option, max 6" wafers
- Default analyzer: B1500A with 4x HRSMU and 2x HPSMU
- Optional E4980A Precision LCR Meter, 20 Hz to 2 MHz
- Chuck temperature from -40 to 200 C
Repository data
| Type: | lab infrastructure |
|---|---|
| Date: | April 2020 |
| Contact: | Sten Vollebregt |