Nextron micro probe station 1

Topic: Special (sensor) characterization setups

Micro probe station from Nextron for small chips with the following specifications:

  • 4 manual probe needles
  • Tabletop microscope for positioning
  • Temperature control from RT up to 750 C
  • Pressure control from 1 to 1000 mbar
  • High vacuum option

Used to characterize pressure sensors and temperature sensors and perform accelerated reliability tests.

Repository data

Type: lab infrastructure
Date: May 2020
Contact: Sten Vollebregt