FEI XL30 SFEG SEM

FEI XL30 SFEG with automatic 50x50 mm stage and various detectors:

• Secondary electrons
• Secondary electrons (through lens)
• Backscattered electrons (diode-based)
• Sample current detector (EBAC)
• Centaurus cathodoluminescence detector (also can be used as PMT-based BSE detector)

Available material analysis options:

• Energy-dispersive X-ray spectroscopy (EDS, EDAX Octane)
• Electron backscatter diffraction (EBSD, EDAX DV5)

For in-situ probing/manipulation:

• Two Kleindiek manipulators with an electrical connection
• Small (~10x10 mm) heating stage up to 450 C
• 15-pin electrical feedthrough