FEI XL30 SFEG SEM
Topic: Special (sensor) characterization setups
FEI XL30 SFEG with automatic 50x50 mm stage and various detectors:
- Secondary electrons
- Secondary electrons (through lens)
- Backscattered electrons (diode-based)
- Sample current detector (EBAC)
- Cathodoluminescence detector (also can be used as PMT-based BSE detector)
Available material analysis options:
- Energy-dispersive X-ray spectroscopy (EDX)
- Electron backscatter diffraction (EBSD)
For in-situ probing/manipulation:
- Two Kleindiek manipulators with an electrical connection
- Small (~10x10 mm) heating stage up to 450 C
- 15-pin electrical feedthrough
Repository data
| Type: | lab infrastructure |
|---|---|
| Authors: | |
| Date: | December 2021 |
| Contact: | Sten Vollebregt |