Topic: Special (sensor) characterization setups

FEI XL30 SFEG with automatic 50x50 mm stage and various detectors:

  • Secondary electrons
  • Secondary electrons (through lens)
  • Backscattered electrons (diode-based)
  • Sample current detector (EBAC)
  • Centaurus cathodoluminescence detector (also can be used as PMT-based BSE detector)

Available material analysis options:

  • Energy-dispersive X-ray spectroscopy (EDS, EDAX Octane)
  • Electron backscatter diffraction (EBSD, EDAX DV5)

For in-situ probing/manipulation:

  • Two Kleindiek manipulators with an electrical connection
  • Small (~10x10 mm) heating stage up to 450 C
  • 15-pin electrical feedthrough

Repository data

Type: lab infrastructure
Date: December 2021
Contact: Sten Vollebregt