Contact: Lina Sarro
The general concept of microsystems technology is to combine new materials with IC technology and micromachining technologies.
Projects under this theme
Thermal management in 3d heterogeneous integration
Wafer-scale fabrication of graphene for sensing applications
Sensing Devices for Organ on Chip Technology
Fabrication of Ultrathin Dynodes for Timed Photon Counter
BiopsyPen: A portable coherent tomography scanner
Piezoelectric Technology for Liquid Applications
Artificial Dielectric Layer for Terahertz application
MEMS nanoreactors for atomic-scale microscopy of nanomaterials under industrially relevant conditions
MEMS nanoreactors are used to study chemical reactions in high-resolution microscopes
Carbon nanotube and atomic layer based solid-state supercapacitors
Thin-film encapsulation of MEMS microcavities
With zero-level packaging or thin-film encapsulation, MEMS are already sealed during wafer processing.