Electronic Components, Technology and Materials
Department of Microelectronics

dr. C. Shen

PhD student
Electronic Components, Technology and Materials (ECTM), Department of Microelectronics

PhD thesis (Nov 2011): Silicon Micromachined Vertical Structures for Nanoparticle Separation
Promotor: Lina Sarro

Expertise: Microsieves for dynamic filtration of nano particles

Themes: MEMS Technology

Biography

Chenggang Shen was born in Shanghai, China in Oct. 1979. In June 2001, After recieving the bachelor degeree in Mechanical Engineering from Shanghai Jiao Tong University (SJTU), he joined Semiconductor Manufacturing International Corporation (SMIC Shanghai) and work in its first fab (fab1, 8 inch). In June 2004, he was relocated to SMIC(Beijing) for the new fab (fab4, 12 inch). In September 2005, he came to Delft University of Technology (TU/D) for master study in microelectronics. His thesis was done in Philips Research,Eindhoven under the supervision of Dr.Ronald Dekker and Prof.P.M.Sarro with the topic ""Micormachined High-Q Cavity Resonators"". Since June 2007 to now, he is a Ph.D student at Delft University of Technology, in the Microsystems/MEMS technology group of ECTM, supervised by Prof. P. M. Sarro. The present research focuses is on microsieves for dynamic filtration of nano particles.

Publications

  1. First-principles study of the effect of functional groups on polyaniline backbone
    X P Chen; J K Jiang; Q H Liang; N Yang; Huaiyu Ye; M Cai; L Shen; D G Yang; T L Ren;
    Scientific Reports,
    Volume 5, pp. 16907, 2015.

  2. Tunable binary fresnel lens based on stretchable PDMS/CNT compsite
    Xueming Li; L. Wei; S. Vollebregt; R. Poelma; Y. Shen; Jia Wei; P. Urbach; P.M. Sarro; GuoQi Zhang;
    In Transducers,
    pp. 2041-2044, 2015.

  3. A buried vertical filter for micro and nanoparticle filtration
    S.J. Li; C. Shen; P.M. Sarro;
    Sensors and Actuators A,
    Volume 186, pp. 203-209., Oct. 2012. DOI 10.1016/j.sna.2012.04.027.

  4. Micromachined nanofiltration modules for lab-on-a-chip applications
    C. Shen; V.R.S.S. Mokkapati; H.T.M. Pham; P.M. Sarro;
    Journal of Micromechanics and Microengineering,
    Volume 22, Issue 2, pp. 1-10., Jan. 2012. DOI 10.1088/0960-1317/22/2/025003.

  5. Studies on localized corrosion in aluminium alloys using in situ transmission electron microscopy
    S.R.K. Malladi; Q. C. Xu Shen; G. Pandraud; F.D. Tichelaar; H.W. Zandbergen;
    In The 15th European Microscopy Congress (EMC 2012),
    Manchester, UK, pp. 1-2, Sept. 2012.

  6. Low temperature encapsulation of nanochannels with water inside
    C. Shen; V.R.S.S. Mokkapati; F. Santagata; A. Bossche; P.M. Sarro;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, pp. 854-857, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969464.

  7. IC compatible top down process for silicon nanowire FET arrays with three 100 surfaces for (BIO) chemical sensing
    T.S.Y. Moh; Y. Maruyama; C. Shen; G. Pandraud; L.C.P.M. de Smet; H.D. Tong; C. van Rijn; E.J.R. Sudholter; P.M. Sarro;
    In 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011),
    Beijing, China, pp. 1590-1593, Jun. 2011. ISBN 978-1-4577-0157-3; DOI 10.1109/TRANSDUCERS.2011.5969796.

  8. A buried vertical filter for micro and nanoparticle filtration
    S.J. Li; C. Shen; P.M. Sarro;
    In C. Tsamis; G. Kaltas (Ed.), Proc. Eurosensors XXV,
    Athens, Greece, Procedia Engineering, pp. 1193-1196, Sep. 2011. DOI 10.1016/j.proeng.2011.12.294.

  9. Silicon micromachined vertical structures for nanoparticle separation
    C. Shen;
    PhD thesis, Delft University of Technology, Nov. 2011. ISBN 978-90-8570-761-5; Promotor: prof.dr. P.M. Sarro.

  10. Characterization of AlN thin films sputtered on Al/Ti electrodes for piezoelectric devices
    A.T. Tran; H. Schellevis; C. Shen; H.T.M. Pham; P.M. Sarro;
    In Proc. of SAFE 2009,
    Veldhoven, The Netherlands, STW, pp. 121-124, 2009.
    document

  11. A Multifunctional Vertical Microsieve for Micro and Nano Particles Separation
    C. Shen; T.M.H. Pham; P.M. Sarro;
    In Micro Electro Mechanical Systems,
    Sorrento, Italy, pp. 383-386, 2009.

  12. Alignment insensitive anisotropic etching of silicon cavities with smooth 49� sidewalls
    C. Shen; H.T.M. Pham; P.M. Sarro;
    In he 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2009,
    pp. 1071-1074, 2009.
    document

BibTeX support

Last updated: 21 Jul 2020

Chenggang Shen

Alumnus