Electronic Components, Technology and Materials
Department of Microelectronics

dr. Hao Hong

PhD student
Electronic Components, Technology and Materials (ECTM), Department of Microelectronics

PhD thesis (Jun 2025): High-Precision Fabrication of Single-Crystal Silicon Nanopores with Extremely Small Feature Sizes
Promotor: GuoQi Zhang, Lina Sarro

Themes: Micro/Nano System Integration and Reliability

Biography

Hong Hao was born in Sichuan, China. He received the B.Sc. degree in applied physics in 2017 and his M.Sc. degree in microelectronics and solid-state electronics in 2020. In 2020, he joined the Electronic Components, Technologies, and Materials (ECTM) group at Delft University of Technology, collaborating with Professor Zewen Liu from Tsinghua University. His main research topic is the study and fabrication of single-crystal silicon nanopores based on wet etching.

Publications

  1. Investigation on fabrication of silicon nanoporesusing an electrochemical passivation etch-stopstrategy
    Hao Hong; Xin Lei; Jiangtao Wei; Wenjun Tang; Minjie Ye; Jianwen Sun; Guoqi Zhang; Pasqualina M. Sarro; Zewen Liu;
    Microsystems & Nanoengineering,
    2025. DOI: doi.org/10.1038/s41378-025-00973-9

  2. High-Precision Fabrication of Single-Crystal Silicon Nanopores with Extremely Small Feature Sizes
    Hao Hong;
    PhD thesis, Delft University of Technology, 2025. DOI: 10.4233/uuid:9077903c-8212-4c19-8b21-97c1669e8dad

  3. Rectification in Ionic Field Effect Transistors Based on Single Crystal Silicon Nanopore
    Hao Hong; Xin Lei; Jiangtao Wei; Yang Zhang; Yulong Zhang; Jianwen Sun; Guoqi Zhang; Pasqualina M. Sarro; Zewen Liu;
    Advanced Electronic Materials,
    pp. 2300782, 2024. DOI: 10.1002/aelm.202300782

  4. Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method
    Hao Hong; Jiangtao Wei; Xin Lei; Haiyun Chen; Pasqualina M. Sarro; Guoqi Zhang; Zewen Liu;
    Microsystems & Nanoengineering,
    Volume 9, pp. 63, 2023. DOI: 10.1038/s41378-023-00532-0

  5. High performance mixed potential type NO2 gas sensor based on porous YSZ layer formed with graphite doping
    Hong, H.; Jianwen Sun; Wu, C.; Liu, Z.;
    Sensors (Switzerland),
    2019. DOI: 10.3390/s19153337

  6. Switch-on undershoot current observed in thin film transistors
    Feng Yan; Piero Migliorato; Yi Hong; V. Rana; R. Ishihara; Y. Hiroshima; D. Abe; S. Inoue; T. Shimoda;
    Journal of Applied Physics,
    Volume 87, Issue 1, 2005.

BibTeX support

Last updated: 8 Jun 2025

Hao Hong

Alumnus